International Journal of Extreme Manufacturing, Volume. 6, Issue 2, 22003(2024)

Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation

Rong Chen1、*, Kun Cao1, Yanwei Wen2, Fan Yang1, Jian Wang1, Xiao Liu1, and Bin Shan2
Author Affiliations
  • 1State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei,People’s Republic of China
  • 2State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei,People’s Republic of China
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    Driven by the growing demand for next-generation displays, the development of advanced luminescent materials with exceptional photoelectric properties is rapidly accelerating, with such materials including quantum dots and phosphors, etc. Nevertheless, the primary challenge preventing the practical application of these luminescent materials lies in meeting the required durability standards. Atomic layer deposition (ALD) has, therefore, been employed to stabilize luminescent materials, and as a result, flexible display devices have been fabricated through material modification, surface and interface engineering, encapsulation, cross-scale manufacturing, and simulations. In addition, the appropriate equipment has been developed for both spatial ALD and fluidized ALD to satisfy the low-cost, high-efficiency, and high-reliability manufacturing requirements. This strategic approach establishes the groundwork for the development of ultra-stable luminescent materials, highly efficient light-emitting diodes(LEDs), and thin-film packaging. Ultimately, this significantly enhances their potential applicability in LED illumination and backlighted displays, marking a notable advancement in the display industry.

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    Rong Chen, Kun Cao, Yanwei Wen, Fan Yang, Jian Wang, Xiao Liu, Bin Shan. Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation[J]. International Journal of Extreme Manufacturing, 2024, 6(2): 22003

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    Paper Information

    Received: Jun. 16, 2023

    Accepted: --

    Published Online: Sep. 6, 2024

    The Author Email: Rong Chen (rongchen@mail.hust.edu.cn)

    DOI:10.1088/2631-7990/ad15f5

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