Optics and Precision Engineering, Volume. 19, Issue 11, 2589(2011)

Fabrication of large area self-supported gold transmission grating for soft X-ray

QIU Ke-qiang*... LIU Zheng-kun, CHEN Huo-yao, XU Xiang-dong, LIU Ying, HONG Yi-lin and FU Shao-jun |Show fewer author(s)
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    References(14)

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    [3] [3] CANIZARES C R, DAVIS J E, DEWEY D, et al.. The Chandra high energy transmission grating: design, fabrication, ground calibration and five years in flight[J].Publications of the Astronomical Society of the Pacific, 2005,117: 1144-1171.

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    [6] [6] XU X D, HONG Y L, HUO T L, et al.. The fabrication techniques for soft X-ray transmission gratings[J]. Optic Technique, 2001, 27(4):294-296.(in Chinese)

    [7] [7] XU X D, HONG Y L, FU SH J, et al.. Holographic ion beam etched diffraction gratings[J]. Physics, 2004, 33(5):340-344. (in Chinese)

    [8] [8] YEN A, ANDERSON E H, GHANBARI R A, et al.. Achromatic holographic configuration for 100-nm-period lithography[J]. Appl.Opt.,1992, 31(22):4540-4545.

    [9] [9] CHANG C H, ZHAO Y,HEILMANN R K, et al.. Fabrication of 50 nm period gratings with multilevel interference lithography[J].Opt.Lett.,2008, 33(14):1572-1574.

    [10] [10] AHN M, HEILMANN R K, SCHATTERNBURG M L.Fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator wafers[J]. J.Vac.Sci.Technolo.B, 2008,26(6):2179-2182.

    [11] [11] HEILMANN R K, AHN M, GULLIKSONE M, et al.. Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors[J]. Opt.Exp.,2008,16(12):8658-8669.

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    QIU Ke-qiang, LIU Zheng-kun, CHEN Huo-yao, XU Xiang-dong, LIU Ying, HONG Yi-lin, FU Shao-jun. Fabrication of large area self-supported gold transmission grating for soft X-ray[J]. Optics and Precision Engineering, 2011, 19(11): 2589

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    Paper Information

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    Received: Mar. 28, 2011

    Accepted: --

    Published Online: Dec. 5, 2011

    The Author Email: Ke-qiang QIU (blueleaf@ustc.edu.cn)

    DOI:10.3788/ope.20111911.2589

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