Optics and Precision Engineering, Volume. 19, Issue 11, 2589(2011)
Fabrication of large area self-supported gold transmission grating for soft X-ray
To meet the need of soft X-ray self-supported transmission gratings for space detecting and plasma diagnostics, self-supported gold transmission gratings were successfully fabricated with the holographic lithography and plating technology. To obtain photo-resist mask patterns with steep sidewalls, a layer of Anti-reflection Coating (ARC) was used to attenuate standing wave resulting from the substrate with high reflectivity. Then,a plating mask was obtained by coating a protective chrome on the mask and using Reactive Ion Etching (RIE). In this process, the plating mask with desired duty cycle could be fabricated via changing the thickness of the protective coating. Finally, a self-supported transmission grating with a line density of 3 450 gr/mm (290 nm period), a duty cycle of 0.55 and 400 nm thick gold bars was fabricated by plating gold in grooves of plating mask. The grating size is up to 10 mm×15 mm, and its +1 order diffraction efficiency is about 5% in the soft X-ray band between 5 and 12 nm in the National Synchrotron Radiation Laboratory (NSRL).
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QIU Ke-qiang, LIU Zheng-kun, CHEN Huo-yao, XU Xiang-dong, LIU Ying, HONG Yi-lin, FU Shao-jun. Fabrication of large area self-supported gold transmission grating for soft X-ray[J]. Optics and Precision Engineering, 2011, 19(11): 2589
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Received: Mar. 28, 2011
Accepted: --
Published Online: Dec. 5, 2011
The Author Email: Ke-qiang QIU (blueleaf@ustc.edu.cn)