Acta Photonica Sinica, Volume. 45, Issue 2, 212004(2016)
Highresolution Defect Inspection for Transparent Indiumtinoxide Conductive Film
The transparent area of indium tin oxide conductive film possibly has two kinds of defects, processingtype and handlingtype. According to the characteristics of different defects and requirements from practicable application, an automatic method for defect inspection based on highresolution vision system was proposed. In the system, a coaxial lighting module using Koler configuration was designed, which was suitable for optical property of indium tin oxide film and meets space requirement of working distance 30mm. In addition, the highresolution imaging module applied to practicable inspection was also designed. It shared a doublet lens with lighting module. After obtaining image of indium tin oxide film, two image preprocessing methods were exploited to inspect each kind of defect respectively. If subtracted image processed by median filter in neighboring radius r=7 from original image, scratch defect could be kept clearly. If processed original image by morphological and threshold method successively, transparent circuit pattern could be observed remarkably. The contrast of the pattern image was increased to 48%. The images after being preprocessed provide reliability for automatic defect recognition, and guarantee sensitivity and accuracy to location of indium tin oxide film.
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CHEN Fanghan, ZHAO Guangyu, JIANG Shilong, PENG Wenda. Highresolution Defect Inspection for Transparent Indiumtinoxide Conductive Film[J]. Acta Photonica Sinica, 2016, 45(2): 212004
Received: Sep. 7, 2015
Accepted: --
Published Online: Apr. 1, 2016
The Author Email: Fanghan CHEN (chenhan620@163.com)