Optics and Precision Engineering, Volume. 14, Issue 1, 121(2006)

Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography

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    References(3)

    [7] [7] LI L,UTTAMCHANDANI D.Design and evaluation of a MEMS optical chopper for fibre optical applications measurement technology[J].MEMS and Microsystems Engineering,2004,151(2):77-83.

    [9] [9] ROY S,FURUKAWA S,MECHREGANY M.Determination of Young's modulus and residual stress of electroless nickel using test structures fabrication in a new surface micromachining process[J].Microsystem Technologies,1996(2):92-96.

    [10] [10] WILLIAM T.Electrostatic comb drive for resonant sensor and actuator applications[D].University of California,1990:42-65.

    CLP Journals

    [1] YAO Feng-lin, GAO Shi-qiao. Dynamic test of vibration for micro machined gyroscope based on high speed photography[J]. Optics and Precision Engineering, 2012, 20(1): 165

    [2] ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled z-axis micromachined gyroscope[J]. Optics and Precision Engineering, 2011, 19(9): 2123

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Optics and Precision Engineering, 2006, 14(1): 121

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    Paper Information

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    Received: Sep. 22, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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