Journal of Radiation Research and Radiation Processing, Volume. 40, Issue 5, 050701(2022)

Research and design of high voltage radiation hardened lateral diffused metal oxide semiconductor

Fei CHU1,2、*, Hongzhuan CHEN1, Ling PENG2, Ying WANG2, and Jingyi NING2
Author Affiliations
  • 1Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China
  • 2Beijing Microelectronics Technology Institute, Beijing 100076, China
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    Lateral diffused metal oxide semiconductors (LDMOS) used in power management integrated circuits demonstrate low anti-radiation performance. To address this issue, a high voltage radiation hardened LDMOS structure was studied, and an N-LDMOS device with a breakdown voltage of 60 V was designed.We analyzed the radiation hardening mechanism of the heavily doped P+well and buffer layer structures using the Ta ion model (Linear energy transfer, LET=79.2 MeV·cm2/mg) with a TCAD simulation tool and verified it via an irradiation test. The results revealed that by using the heavily doped P+well and buffer layer structures, the single event burnout voltage of the high-voltage LDMOS could be improved to 60 V.

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    Fei CHU, Hongzhuan CHEN, Ling PENG, Ying WANG, Jingyi NING. Research and design of high voltage radiation hardened lateral diffused metal oxide semiconductor[J]. Journal of Radiation Research and Radiation Processing, 2022, 40(5): 050701

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    Paper Information

    Category: Research Articles

    Received: Mar. 23, 2022

    Accepted: May. 6, 2022

    Published Online: Nov. 3, 2022

    The Author Email: CHU Fei (sdcf_2000@163.com)

    DOI:10.11889/j.1000-3436.2022-0035

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