Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses

Dun Liu; Shibin Wu; Wei Yang; Lihua Wang; Bin Fan; Fan Wu

doi:10.3788/COL201816.090501

Chinese Optics Letters, Volume. 16, Issue 9, 090501(2018)

Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses

Dun Liu^1,2、*, Shibin Wu^1、**, Wei Yang¹, Lihua Wang¹, Bin Fan¹, and Fan Wu¹

Author Affiliations

¹Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Dun Liu, Shibin Wu, Wei Yang, Lihua Wang, Bin Fan, Fan Wu. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. Chinese Optics Letters, 2018, 16(9): 090501

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Paper Information

Category: Diffraction and Gratings

Received: Mar. 15, 2018

Accepted: Jul. 27, 2018

Published Online: Sep. 6, 2018

The Author Email: Dun Liu (Ldun028@163.com), Shibin Wu (sbwu@ioe.ac.cn)

DOI:10.3788/COL201816.090501

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