[1] [1] ZHANG T,WU Y H,LI H W,et al..Micro electromagnetic actuator with high energy density based on MEMS technology[J].Opt.Precision Eng.,2007,15(6):866-872.(in Chinese)

[2] [2] WEI X G,JIANG J,WEN ZH M,et al..Optical system design for MEMS based digital sun sensor[J].Opt.Precision Eng.,2008,16(8):1361-1366.(in Chinese)

[3] [3] SHI Y F,SHI Y B,LIU Y H,et al..Sulfur dioxide poison gas sensor based on MEMS laminated microstructure[J].Opt.Precision Eng.,2008,16(6):1075-1081.(in Chinese)

[4] [4] MILANOVIC V,GAITAN M,BOWEN E D,et al..Thermoelectric power sensor for microwave applications by commercial cmos fabrication[J].IEEE Electron Device Letters,1997,18(9):450-452.

[5] [5] MILANOVIC V,GAITAN M,BOWEN E D,et al..Implementation of thermoelectric microwave power sensors in cmos technology[C].IEEE International Symposium on Circuits and Systems,1997(4):2753-2756.

[6] [6] MUTANMBA K,BEILENHOFF K,MEGEJ A,et al..Micromachined 60 GHz GaAs power sensor with integrated received antenna[C].Proceedings of IEEE MTT-S Symposium,2001(3):2235-2238.

[7] [7] MILANOVIC V,GAITAN M,ZAGHLOUL M E.Micromachined Thermocouple microwave detector in cmos technology[C].IEEE 39th Midwest symposium on Circuits and Systems,1996(1):273-276