Infrared and Laser Engineering, Volume. 51, Issue 5, 20210303(2022)
Prediction analysis of subsurface damage of work-part ZnS in fixed abrasive lapping
Figures & Tables(14)
Fig. 4. (a) Profile curve of polished slope; (b) Curve after fitting
Fig. 5. Simulation results of subsurface microcracks with different particle sizes: (a) W5; (b) W15; (c) W25; (d) W30
Fig. 6. Subsurface microcracks at different depths after W25 abrasive grain processing: (a) 0 μm; (b) 2.30 μm; (c) 3.04 μm; (d) 3.57 μm; (c) 4.39 μm; (d) 6.27 μm
Fig. 7. Microscopic observation of microcrack end point: (a) W5; (b) W15; (c) W30
Fig. 9. Comparison of simulated and measured depth of microcrack layer
Table 1. Actual value and two-dimensional model value of material property parameters
View tableView in ArticleTable 1. Actual value and two-dimensional model value of material property parameters
$E/{\rm{GPa}}$ υ $ {\sigma }_{b}/{\rm{MPa} } $ $ {\sigma }_{bb}/{\rm{MPa } } $ Actual parameters 85.5 0.27 50.0 103.0 Model parameter 89.2 0.28 49.1 110.5
Table 2. Preparation parameters of consolidated abrasive pad
View tableView in ArticleTable 2. Preparation parameters of consolidated abrasive pad
$ \eta $ $ {\lambda }_{0} $ ${E}^{\mathrm{*} }/{\rm{GPa }}$ 0.12 0.44 1.085
Table 3. Average cutting depth corresponding to different diamond particle sizes
View tableView in ArticleTable 3. Average cutting depth corresponding to different diamond particle sizes
Particle size/μm Average cutting depth/nm 5 98.2 15 294.7 25 491.1 30 589.3
Table 4. Processing parameters of Zinc sulfide
View tableView in ArticleTable 4. Processing parameters of Zinc sulfide
Load/ kPa Rotate speed of pad/r·min−1 Rotate speed of workpiece/r·min−1 Lapping time/ min 20 85 80 3
Table 5. Process parameters of angle polishing
View tableView in ArticleTable 5. Process parameters of angle polishing
Polishing pad Polyurethane Flannelette Pressure/kPa 10 10 Rotate speed of pad/r·min−1 85 85 Rotate speed of workpiece/r·min−1 80 80 Polishing time/min 10 40
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Yufei Zhang, Zikun Wang, Weidong Hu, Fengli Niu, Yongwei Zhu. Prediction analysis of subsurface damage of work-part ZnS in fixed abrasive lapping[J]. Infrared and Laser Engineering, 2022, 51(5): 20210303
Paper Information
Category: Optical devices
Received: Dec. 25, 2021
Accepted: --
Published Online: Jun. 14, 2022
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