Infrared and Laser Engineering, Volume. 34, Issue 1, 23(2005)
Fabrication and research of very thin Si membrane for the high sensitivity infrared detector
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication and research of very thin Si membrane for the high sensitivity infrared detector[J]. Infrared and Laser Engineering, 2005, 34(1): 23