Laser & Optoelectronics Progress, Volume. 58, Issue 3, 3120041(2021)
Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System
Aiming at the problems of harmonic crosstalk and small dynamic measurement range in traditional frequency modulation continuous wave laser interferometer displacement sensors, a three-channel displacement measurement system with three independent Fabry-Perot interferometer detection optical paths is developed. The system includes three chips, and the operation speed can be improved by using multi-chip processing. The simultaneous measurement of each chip is controlled by the equal length of the signal line and software, which can solve the problem of non-synchronization of the independent channel measurement. The experimental results show that the synchronization measurement error of each channel for a moving target with a velocity of 1 mm/s is only 0.46 nm, the standard deviation of the displacement measurement error of a 600 mm stroke is less than 3 nm, and the linear fitting coefficient is above 0.99997, indicating that this system can achieve the displacement measurement of three-dimensional moving targets.
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Sheng Qiming, Zheng Gang, Zhang Xiongxing, Sun Bin, Jing Liqiang, Han Yuan. Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System[J]. Laser & Optoelectronics Progress, 2021, 58(3): 3120041
Category: Instrumentation, Measurement and Metrology
Received: Jun. 1, 2020
Accepted: --
Published Online: Mar. 12, 2021
The Author Email: Gang Zheng (zhengg@xatu.edu.cn)