[1] WANG Jie, CHANG Suping, XIE Tiebang. Research on white light interference vertical scanning measurement method of three-dimensional surface profile[J]. Journal of Metrology, 27, 160-163(2006).

[2] MA Long. Research on white light scanning interferometry method and system[D](2011).

[3] JO T, KIM S, PAHK H. 3D measurement of TSVs using low numerical aperture white-light scanning interferometry[J]. Journal of the Optical Society of Korea, 17, 317-322(2013).

[4] MONTGOMERY P C, MONTANER D, MANZARDO O et al. The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy[J]. Thin Solid Films, 450, 79-83(2004).

[5] MONTGOMERY P C, MONTANER D, MANZARDO O et al. Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy[J]. Optical Micro-and Nanometrology in Manufacturing Technology, 5458, 34-42(2004).

[6] XIE Weichang, PETER L, JAN N et al. Signal modeling in low coherence interference microscopy on example of rectangular grating[J]. Optics Express, 24, 14283(2016).

[7] PETER L, XIE Weichang, BENEDIKT A et al. Coherence scanning and phase imaging optical interference microscopy at the lateral resolution limit[J]. Optics Express, 26, 7376(2018).

[8] HARVEY J, KRYWONOS A, VERNOLD C L. Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles[J]. Optical Engineering, 46(2007).

[9] TAVROV A, SCHMIT J, KERWIEN N et al. Diffraction-induced coherence levels[J]. Applied Optics, 44, 2202-2212(2005).

[10] BISCHOFF J, PAHL T, LEHMANN P et al. Model-based dimensional optical metrology[C], 11352, 161-173(2020).

[11] THOMAS M, SU R, NIKOLAEV N et al. Modeling of interference microscopy beyond the linear regime[J]. Optical Engineering, 59, 034110(2020).

[12] THOMAS M, SU R, NIKOLAEV N et al. Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method[C], 11057, 234-245(2019).

[13] TORRES M E, COLOMINAS M A, SCHLOTTHAUER G et al. A complete ensemble empirical mode decomposition with adaptive noise[C], 4144-4147(2011).

[14] XU Hongjie, LUO Huigang. Interference signal envelope extraction based on wavelet transform method[J]. Semiconductor Optoelectronics, 38, 406-409,413(2017).

[15] SUN Yifeng, GAO Zhishan, FAN Xiaoxin et al. Signal processing technology of high aspect ratio structure height detection based on low coherent interference[J]. Acta Photonica Sinica, 51, 0912001(2022).

[16] GE Debiao, YAN Yubo[M]. Finite difference time domain method for electromagnetic wave(2002).

[17] WANG Li. Simulation of two-dimensional electromagnetic wave propagation by finite difference time domain method[J]. Ship Science and Technology, 33, 49-51,74(2011).

[18] LUEBBERS R, RYAN D, BEGGS J et al. A two-dimensional time-domain near-zone to far-zone transformation[J]. IEEE Transactions on Antennas and Propagation, 40, 848-851(1992).

[19] XIE Weichang. Transfer characteristics of white light interferometers and confocal microscopes[D](2017).