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Microelectronics, Volume. 53, Issue 4, 716(2023)

Research Progress of Resistive MEMS Semiconductor Gas Sensors with Low Power

ZHAO Liqiang1... XIANG Xingyan1, WANG Gang2, LI Wei2 and LIU Jiangang2 |Show fewer author(s)
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    ZHAO Liqiang, XIANG Xingyan, WANG Gang, LI Wei, LIU Jiangang. Research Progress of Resistive MEMS Semiconductor Gas Sensors with Low Power[J]. Microelectronics, 2023, 53(4): 716

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    Received: Aug. 11, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220291

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology