Acta Photonica Sinica, Volume. 34, Issue 1, 25(2005)
Fabrication of 808 nm SQW Semiconductor Laser Facet AR HR Coating
HfO 2/SiO 2 front and back facet coatings of 808 nm SQW semiconductor laser has been fabricated with Plasma Assisted Electron Beem Deposition (Plasma-Ion Assisted Deposition) method.Front AR coating reflectivity is as low as 12.2% and back HR coating is as high as 97.9%.The output power is improved 79%,external different quantum efficiency improved 80%.The output efficiency increased from 22.2% to 39.8% for 100 μm wide 1000 μm-cavity length device.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of 808 nm SQW Semiconductor Laser Facet AR HR Coating[J]. Acta Photonica Sinica, 2005, 34(1): 25