Researching | Design of microscope optical system for panel inspection

Optical Instruments, Volume. 43, Issue 1, 42(2021)

Design of microscope optical system for panel inspection

Lu CHEN and Zhiqiang LI^*

Author Affiliations

Skyverse Limited, Shenzhen 518000, China

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Table 1. [in Chinese]
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Table 1. [in Chinese]
设计指标数值
放大倍率 20^x
数值孔径 0.42
视场/mm 1.2
焦距/mm 10
分辨率/μm 0.8
工作距离/mm 0.6
光谱范围/nm 400～760
总长/mm <40

Table 2. [in Chinese]
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Table 2. [in Chinese]
灰度类别最大值最小值平均值均匀性
水平方向灰度 134.4 130.0 132.5 98.0%
竖直方向灰度 135.3 130.7 132.5 98.6%

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Lu CHEN, Zhiqiang LI. Design of microscope optical system for panel inspection[J]. Optical Instruments, 2021, 43(1): 42

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Paper Information

Category: OPTICAL SYSTEM

Received: Oct. 27, 2020

Accepted: --

Published Online: Mar. 26, 2021

The Author Email: LI Zhiqiang (951878970@qq.com)

DOI:10.3969/j.issn.1005-5630.2021.01.007

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology