Semiconductor Optoelectronics, Volume. 42, Issue 6, 875(2021)
Effect of Sputtering Pressure on Optical Properties of Ga2O3 Films Prepared by RF Magnetron Sputtering
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ZHANG Ruixin, SUN Hui, CHENG Jia, LIU Zitong, CHEN Jianjin, SHEN Longhai. Effect of Sputtering Pressure on Optical Properties of Ga2O3 Films Prepared by RF Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2021, 42(6): 875
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Received: Oct. 2, 2021
Accepted: --
Published Online: Feb. 14, 2022
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