Semiconductor Optoelectronics, Volume. 42, Issue 6, 875(2021)

Effect of Sputtering Pressure on Optical Properties of Ga2O3 Films Prepared by RF Magnetron Sputtering

ZHANG Ruixin... SUN Hui, CHENG Jia, LIU Zitong, CHEN Jianjin and SHEN Longhai |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    ZHANG Ruixin, SUN Hui, CHENG Jia, LIU Zitong, CHEN Jianjin, SHEN Longhai. Effect of Sputtering Pressure on Optical Properties of Ga2O3 Films Prepared by RF Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2021, 42(6): 875

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 2, 2021

    Accepted: --

    Published Online: Feb. 14, 2022

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2021100201

    Topics