Opto-Electronic Engineering, Volume. 31, Issue z1, 70(2004)

Electron and ion dual beam nanometer working station

[in Chinese]1...2, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    References(3)

    [3] [3] PREWETr P D, MAIR GLR. Some comment on mechanism of liquid metal ion source[J].J phys, 1983, D17: 2305-2321.

    [4] [4] SHEU B L, WANG Y L. Emission properties of a dual ion/electron source based on Au-In alloy[J]. Applied Physics, 2002,80(8): 84-87.

    [5] [5] ORLOFF Jon. High-resolution focused ion beams [J]. Review of Scientific Instrument, 1993, 64(5): 1105.

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    [in Chinese], [in Chinese], [in Chinese]. Electron and ion dual beam nanometer working station[J]. Opto-Electronic Engineering, 2004, 31(z1): 70

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    Paper Information

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    Received: Jul. 16, 2004

    Accepted: --

    Published Online: Nov. 14, 2007

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