Opto-Electronic Engineering, Volume. 31, Issue z1, 70(2004)
Electron and ion dual beam nanometer working station
[3] [3] PREWETr P D, MAIR GLR. Some comment on mechanism of liquid metal ion source[J].J phys, 1983, D17: 2305-2321.
[4] [4] SHEU B L, WANG Y L. Emission properties of a dual ion/electron source based on Au-In alloy[J]. Applied Physics, 2002,80(8): 84-87.
[5] [5] ORLOFF Jon. High-resolution focused ion beams [J]. Review of Scientific Instrument, 1993, 64(5): 1105.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Electron and ion dual beam nanometer working station[J]. Opto-Electronic Engineering, 2004, 31(z1): 70