Electron and ion dual beam nanometer working station

Opto-Electronic Engineering, Volume. 31, Issue z1, 70(2004)

[in Chinese]1...2, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese]. Electron and ion dual beam nanometer working station[J]. Opto-Electronic Engineering, 2004, 31(z1): 70

Download Citation

Paper Information

Category:

Received: Jul. 16, 2004

Accepted: --

Published Online: Nov. 14, 2007

The Author Email:

DOI:

Topics