Researching | Application of fuzzy neural network to optimizing UV-LIGA process

Optics and Precision Engineering, Volume. 14, Issue 1, 139(2006)

Application of fuzzy neural network to optimizing UV-LIGA process

[in Chinese]^1,2 and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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References(3)

[1] [1] KOO H,LIU K,TSENG F.Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts[J].Micromech.Microeng.,2003,13:822-831.

[2] [2] ZHANG J,TAN L K,GONG Q H.Characterization of the polymerization of SU-8 photoresist and its application in micro-electro-mechanical systems[J].Polymer Testing,2001,20:693-701.

[3] [3] HONG S J,CHOI S K,CHOL Y S,et al.Characterization of low-temperature SU-8 photoresist processing for MEMS applications[C].2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.Hawaii.,2004:404-408.

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[2] CHEN Xiang-jian, LI Di, BAI Yue, XU Zhi-jun. Application of type-II fuzzy neural network to adaptive double axis motion control system[J]. Optics and Precision Engineering, 2011, 19(7): 1643

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[in Chinese], [in Chinese]. Application of fuzzy neural network to optimizing UV-LIGA process[J]. Optics and Precision Engineering, 2006, 14(1): 139

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Paper Information

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Received: Aug. 10, 2005

Accepted: --

Published Online: Feb. 18, 2008

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology