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Laser & Optoelectronics Progress, Volume. 58, Issue 16, 1600002(2021)

Research on Microscopic 3D Measurement System Based on Focus Variation

Minghao Shang and Feihong Yu*
Author Affiliations
  • College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    Article index updated:May. 23, 2024

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    Minghao Shang, Feihong Yu. Research on Microscopic 3D Measurement System Based on Focus Variation[J]. Laser & Optoelectronics Progress, 2021, 58(16): 1600002

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    Paper Information

    Category: Reviews

    Received: Oct. 27, 2020

    Accepted: Dec. 8, 2020

    Published Online: Jul. 16, 2021

    The Author Email: Yu Feihong (feihong@zju.edu.cn)

    DOI:10.3788/LOP202158.1600002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology