Optics and Precision Engineering, Volume. 20, Issue 11, 2479(2012)

Eccentric testing of benchmark circular grating and compensation of angular error

AI Chen-guang*... CHU Ming, SUN Han-xu, ZHANG Yan-heng and YE Ping |Show fewer author(s)
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    AI Chen-guang, CHU Ming, SUN Han-xu, ZHANG Yan-heng, YE Ping. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Optics and Precision Engineering, 2012, 20(11): 2479

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    Paper Information

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    Received: Jul. 26, 2012

    Accepted: --

    Published Online: Nov. 28, 2012

    The Author Email: Chen-guang AI (Aichenguang@gmail.com)

    DOI:10.3788/ope.20122011.2479

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