Acta Photonica Sinica, Volume. 41, Issue 12, 1452(2012)

Development of Phase-shifting Device of Wavefront Aberration Detecting Stage for Lithographic Projection Objective

QI Ke-qi* and XIANG Yang
Author Affiliations
  • [in Chinese]
  • show less
    References(10)

    [1] [1] XU Xiao-dong, WANG Hui. Lithography technology for sub265 nm nodes and beyond[J]. Semiconductor Technology, 2007, 32(11): 921-925.

    [2] [2] GUO Li-ping, HUANG Hui-jie, WANG Xiang-zhao. Study of integrator rod in step and scan lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981-985.

    [3] [3] ZHOU Hu-ming, HAN Juan. Match and alignment accuracy of step and repeat system[J]. Electronics & Packaging, 2003, 3(3): 40-44.

    [4] [4] YUAN Qiong-yan, WANG Xiang-zhao. Recent development of international mainstream lithographic tools[J]. Laser & Optoelectronics Progress, 2007, 41(1): 57-63.

    [5] [5] ZHANG Wen-tao, LI Tong-bao. Analysis of nanometrology and atom photolithography[J]. Journal of Applied Optics, 2006, 27(3): 242-249.

    [6] [6] LUO Xian-gang, YAO Han-min, ZHOU Chong-xi, et al. New technology which can improve lithography resolution[J]. Acta Photonica Sinica, 2000, 29(9): 834-837.

    [7] [7] HASEGAWA M, OUCHI C, HASEGAWA T, et al. Recent progress of EUV wavefront metrology in EUVA[C]. SPIE, 2004, 5533: 27-36.

    [8] [8] HASEGAWA T, OUCHI C, HASEGAWA M, et al. EUV wavefront metrology system in EUVA[C]. SPIE, 2004, 5374: 797-807.

    [9] [9] MURAKAMI K, SAITO J, OTA K, et al. Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes[C]. SPIE, 2003, 5037:257-264.

    CLP Journals

    [1] PENG Hai-feng, SUN Zhen. Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens[J]. Acta Photonica Sinica, 2014, 43(4): 422005

    Tools

    Get Citation

    Copy Citation Text

    QI Ke-qi, XIANG Yang. Development of Phase-shifting Device of Wavefront Aberration Detecting Stage for Lithographic Projection Objective[J]. Acta Photonica Sinica, 2012, 41(12): 1452

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Jul. 30, 2012

    Accepted: --

    Published Online: Dec. 24, 2012

    The Author Email: Ke-qi QI (qikeqi1985@126.com)

    DOI:10.3788/gzxb20124112.1452

    Topics