Chinese Optics Letters, Volume. 11, Issue s1, S10215(2013)
Studies on properties of YbF3 thin film by different deposition parameters
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Yaoping Zhang, Hong Zhou, Junqi Fan, Hong Xu. Studies on properties of YbF3 thin film by different deposition parameters[J]. Chinese Optics Letters, 2013, 11(s1): S10215
Paper Information
Category: Deposition and process control
Received: Nov. 12, 2012
Accepted: Jan. 7, 2013
Published Online: Jun. 10, 2013
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