Infrared and Laser Engineering, Volume. 52, Issue 6, 20220863(2023)
Design of optical polarization system for defect detection on highly reflective surfaces
Figures & Tables(18)
Fig. 5. (a) Field curvature and (b) distortion evaluation diagram of polarization detection system
Fig. 6. Geometric spot diagrams results of the polarization detection system
Fig. 7. Evaluation results of energy envelope diagram of polarization detection system
Fig. 8. The relative illuminance curve of polarization detection system
Fig. 11. Monte Carlo analysis results of the polarization detection system
Fig. 12. Schematic of the polarization detection system for surface defects of highly reflective workpieces
Fig. 13. Detection images of high reflective surface damage precursors at different polarization angles
Fig. 14. The Stokes vector, polarization degree, polarization angle, and fused image processing results
Fig. 15. Stokes vector image, polarization degree and polarization angle image processing results
Table 1. Design parameters of polarization detection system
View tableView in ArticleTable 1. Design parameters of polarization detection system
Design parameters Value Wavelength/μm 0.4-0.7 Image sensor type CMOS Pixel count 2448×2048 Pixel size/μm 3.45 Focal length f/mm 50.0 F number 2 Working distance WD/mm 300 Half image height y/mm 5.61
Table 2.
Q -type aspheric coefficient of surface S7 and S9View tableView in ArticleTable 2.
Q -type aspheric coefficient of surface S7 and S9Parameter S7 S9 ρbfs/mm −10.3915 −18.6013 hmax/mm 4.740 5.650 a0/mm 7.376×10−1 −2.020×10−2 a1/mm 4.195×10−1 −1.133×10−3 a2/mm −1.220×100 −3.396×10−1 a3/mm 6.795×10−1 3.037×10−1 a4/mm −1.882×10−1 −1.219×10−1 a5/mm 2.160×10−2 2.180×10−2
Table 3. Tolerance value of polarization detection system
View tableView in ArticleTable 3. Tolerance value of polarization detection system
Tolerance Value Radius/mm ±0.20 Thickness/mm ±0.14 Surface eccentricity/mm ±0.08 Surface inclination/mm ±0.06 Surface irregularity/fringe 0.14 Element eccentricity/mm ±0.05 Element tilt/(°) ±0.20 Refractive index ±0.001 Abbe number ±1%
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Xing Peng, Dede Zhai, Feng Shi, Ye Tian, Ci Song, Guipeng Tie, Yongxiang Shen, Shuo Qiao, Xiao Shen, Wanli Zhang, Sheng Wang, Ningye Ruan. Design of optical polarization system for defect detection on highly reflective surfaces[J]. Infrared and Laser Engineering, 2023, 52(6): 20220863
Paper Information
Category: Optical design
Received: Dec. 1, 2022
Accepted: --
Published Online: Jul. 26, 2023
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