Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1300001(2022)
Research Progress of Terahertz Waveplate Based on Metasurface
Figures & Tables(16)
![THz-QWP structure based on natural materials. (a) THz-QWP based on quartz crystal[13]; (b) THz-QWP based on graphene grating[15]](/Images/icon/loading.gif){kind=icon}
Fig. 4. Structure of THz-HWP based on SRR. (a) Unit structure of the QWP; (b) metal layer structure of the rectangular split resonator[32]
Fig. 5. Structure of THz-HWP based on interference coupling. (a) Unit structure of the metasurface half-wave plate; (b) structure of the first metal film; (c) structure of the second metal film[39]
Fig. 6. Structure of THz-HWP based on Mie resonance. (a) Unit cell structure of the all-dielectric metamaterial; (b) top view of the unit cell; (c) bottom view of unit cell[43]
Fig. 7. Structure of switchable THz-WP. (a) Schematic diagram of the VO2-metal hybrid metasurface; (b) top view of the cell structure[51]
Fig. 8. Structure of continuously tuned THz-WP. (a) Structure of the DFLC cell; (b) cross-section of DFLC[54]
Table 1. Performance comparison of THz-WP based on natural materials
View tableTable 1. Performance comparison of THz-WP based on natural materials
Ref. Year Function Frequency /THz Material Size Bandwidth /% Insertion loss /% Structure ［ 12 ］2006 QWP 0.92 quartz 32 mm 163.0 45 six quartz plates ［ 13 ］2013 QWP 1.55 quartz 10 cm 32.3 50 nine pieces of quartz plates ［ 14 ］2021 QWP 0.60 DSO 50 μm 33.3 91 （110）-cut DSO crystals 0.56 370 μm 19.8 93 （001）-cut DSO crystals
Table 2. Performance comparison of THz-WP based on dielectric grating
View tableTable 2. Performance comparison of THz-WP based on dielectric grating
Ref. Year Function Frequency /THz Material Size Bandwidth /% Insertion loss /% Structure ［ 18 ］2015 QWP 0.64 silicon 500 μm 51.6 30 silicon grating ［ 19 ］2016 HWP 1.05 silicon 950 μm 76.2 31 gradient grating ［ 20 ］2021 HWP 0.14 polystyrene 4.8 mm 37.0 <10 low-index polymer grating 0.30 35.0 <15
Table 3. Performance comparison of THz-WP based on SPR
View tableTable 3. Performance comparison of THz-WP based on SPR
Ref. Year Function Frequency /THz Dielectricmaterial Metal Layer Size /μm Bandwidth /% PCR /% Mode Transmission /% Insertion loss /% Structure ［ 25 ］2009 QWP 1.30 bencocycl-
obutene
Cu 2 110 2.9 ~55 T 74 45 a cut-wire pair HWP 1.34 2 110 2.8 ~34 58 66 ［ 26 ］2014 QWP 1.07 polypropy-
lene
Au 1 40 16.7 ~30 T 55 70 a hole array 2.29 2.9 ~5 23 95 ［ 27 ］2018 HWP 1.1 polyimide Au 1 25.3 54.5 65 R / 20 metal rods ［ 28 ］2020 QWP 0.28 cyclic olefin copolymer Au 3 540 53.3 70 T 75 43 three metallic layers ［ 29 ］2021 HWP 0.262 cyclic olefin copolymer Au 3 125 31.7 ~59 T 77 41 three metallic layers ［ 30 ］2013 HWP 1.04 polyimide Au 3 33 50.0 >50 R / 20 cut-wire array ［ 31 ］2017 HWP 1.165 polyimide Au 1 33 84.0 >85 R / 30 two pairs of patches
Table 4. Performance comparison of THz-WP based on resonator
View tableTable 4. Performance comparison of THz-WP based on resonator
Ref. Year Function Frequency /THz Dielectric material Metal Layer Size /μm Bandwidth /% PCR /% Transmission /% Insertion loss /% Structure ［ 32 ］2009 QWP 0.64 polyimide Au 1 20 15 99 / 50 SRR ［ 33 ］2016 QWP 0.73 zeonor Ti/Au 1 23 25 10‒41 32 59 SRR 1.13 30 ~64 ~90 ［ 34 ］2018 QWP 0.98 bisbenzoc-yclobutene Al 2 48 12 64 80 36 SRR ［ 35 ］2021 QWP 1.86 polyimide Al 1 37 43 26 ~26 92 wave-shape resonator
Table 5. Performance comparison of THz-WP based on interference coupling
View tableTable 5. Performance comparison of THz-WP based on interference coupling
Ref. Year Function Frequency /THz Dielectric material Metal Layer Size Bandwidth /% PCR /% Mode Transmission /% Insertion loss /% Structure ［ 36 ］2015 HWP 0.3 polyimide stainless steel 3 270 μm 66 ~100 T 95 10 metallic grating ［ 37 ］2019 QWP 1.02 silicon Au 3 44 μm 80 >90 R / 8 dielectric pillar ［ 38 ］2020 HWP 0.15 polypropy-lene Al 2 100 μm 9 90 T 83 30 Zigzag shape ［ 39 ］2020 HWP 0.695 polyimide Al 2 18 mm 73 ~80 T 97 20 S-shaped
chained
Table 6. Comparison of THz-WP performance based on meter resonance
View tableTable 6. Comparison of THz-WP performance based on meter resonance
Ref. Year Function Frequency /THz Dielectric material Size /μm Bandwidth /% PCR /% Transmission /% Insertion loss /% Structure ［ 41 ］2018 QWP 1.76 silicon 100 59 57 75 43 elliptical air holes ［ 42 ］2018 HWP 0.73 silicon 200 35 68 82 33 two silicon antennas ［ 43 ］2020 HWP 0.83 silicon 220 36 ~60 77 40 two silicon pillars
Table 7. Performance comparison of switchable THz-WP
View tableTable 7. Performance comparison of switchable THz-WP
Ref. Year Function Frequency /THz Dielectric material Metal Layer Size /μm Bandwidth /% PCR /% External incentives ［ 47 ］2020 HWP 2.20 polymer、VO2 Au 3 22.2 18 99 temperature QWP 2.12/2.93 44/2 85 ［ 48 ］2020 HWP 0.99 cyclic olefin copolymer、VO2 Au 4 75.6 83 98 temperature QWP 1.13 83 >90 ［ 49 ］2021 HWP 4.59 graphene、ZrO2 Au 3 27.2 73 90 electrostatic gating QWP 5.46 37 >90 ［ 50 ］2021 HWP 1.00 polyimide、VO2 Au 3 39.2 40 96 thermal，optical or electrical stimulus QWP ~100
Table 8. Performance comparison of continuously tuned THz-WP
View tableTable 8. Performance comparison of continuously tuned THz-WP
Ref. Year Function Dielectric material Metal Size /μm External incentives Principle Structure ［ 54 ］2018 HWP/QWP silica、DFLC Cu 1600 square
wave voltage
birefringence of DFLC silica-DFLC-silica ［ 55 ］2019 HWP/QWP polydimethylsiloxane、SiO2 Au、Cr 100 mechanically
stretched
tight coupling elementary resonators ［ 56 ］2020 HWP/QWP amorphous silicon / 1500 angle tunable photonic inverse freeform metasurface ［ 57 ］2021 HWP/QWP silica、LC Au 900 variable E-field local resonance，
LC birefringence
LC integrated metal grating
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Zhuo Zhang, Yandong Gong, Ke Li. Research Progress of Terahertz Waveplate Based on Metasurface[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300001
Paper Information
Category: Reviews
Received: Sep. 14, 2021
Accepted: Sep. 30, 2021
Published Online: Jun. 6, 2022
The Author Email: Gong Yandong (eydgong@bistu.edu.cn)
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