Optics and Precision Engineering, Volume. 27, Issue 9, 2011(2019)

Effect of nozzle cavity on polishing ability of light coupled colloid jet

SONG Xiao-zong* and YAO Tong
Author Affiliations
  • [in Chinese]
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    References(11)

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    [3] [3] LEI H, TONG K Y, WANG Z Y. Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates[J]. Materials Chemistry and Physics, 2016, 172: 26-31.

    [4] [4] XU Y C, LU J, XU X P, et al.. Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP[J]. International Journal of Machine Tools and Manufacture, 2018, 130/131: 12-19.

    [6] [6] WANG X, XU Q, ZHANG Y, et al.. Nanoparticle colloid self-induced pulsed cavitation jet polishing[J]. Opt. Precision Eng., 2018, 26(9): 2295-2304.(in Chinese)

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    [8] [8] SONG X Z, GONG J. Properties of ultraviolet-visible beam propagation in TiO2 nanoparticle colloid[J]. High Power Laser and Particle Beams, 2015, 27(2): 58-61. (in Chinese)

    [10] [10] LIANG Q, GAO G J, LIU Q Z. Analysis on influence of nozzle profile on nozzle energy loss based on CFD[J]. Mining & Processing Equipment, 2014, 42(3): 94-98.(in Chinese)

    [11] [11] HAN Q L, MA Y. Influence of nozzle structure on high pressure water jet and optimization design of nozzle structure parameter[J]. Journal of National University of Defense Technology, 2016, 38(3): 68-74.(in Chinese)

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    SONG Xiao-zong, YAO Tong. Effect of nozzle cavity on polishing ability of light coupled colloid jet[J]. Optics and Precision Engineering, 2019, 27(9): 2011

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    Paper Information

    Received: May. 21, 2019

    Accepted: --

    Published Online: Oct. 14, 2019

    The Author Email: Xiao-zong SONG (songxiaozong@126.com)

    DOI:10.3788/ope.20192709.2011

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