Optical Instruments, Volume. 43, Issue 6, 46(2021)

Development of 10.56 μm NBP filter for sulfur hexafluoride gas detection

Hu HE... Qing XU, Jie ZHANG and Haiyang YU |Show fewer author(s)
Author Affiliations
  • R&D center, Shanghai AEGIS Industrial Safety Equipment Co., LTD, Shanghai 201114, China
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    Figures & Tables(10)
    Structure of NDIR gas sensor
    Measuring device of gas absorption spectra
    Spectra of air,sulfur hexafluoride and filter
    Dual-channel IR sensor with TO-packaged
    Transmissivity spectrum of silicon wafer
    Spectral curves of Ge and ZnS films
    Transmission spectrum of narrow band main film
    Transmittance spectrum of the cut-off film
    Spectra of the filter
    • Table 1. Coating process parameters

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      Table 1. Coating process parameters

      工艺因素控制参数
      背景真空5×10−4 Pa
      烘烤温度200 ℃
      恒温时间120 min
      离子束偏压200 V
      离子轰击时间10 min
      膜厚控制光控+晶控
      Ge镀膜速率0.5 nm/s
      ZnS镀膜速率2.5 nm/s
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    Hu HE, Qing XU, Jie ZHANG, Haiyang YU. Development of 10.56 μm NBP filter for sulfur hexafluoride gas detection[J]. Optical Instruments, 2021, 43(6): 46

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    Paper Information

    Category: DESIGN AND RESEARCH

    Received: Aug. 19, 2021

    Accepted: Nov. 8, 2021

    Published Online: Jun. 29, 2022

    The Author Email:

    DOI:10.3969/j.issn.1005-5630.2021.06.008

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