Acta Optica Sinica, Volume. 18, Issue 1, 90(1998)
Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment
References(1)
[3] [3] H. E. Bennett, Use of MIL-O-13830 for specifying the surface quality of laser optics. Proc. SPIE, 1985, 525: 78～81
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[in Chinese], [in Chinese], [in Chinese]. Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment[J]. Acta Optica Sinica, 1998, 18(1): 90
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