Acta Optica Sinica, Volume. 18, Issue 1, 90(1998)
Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment
An experimental arrangement has been built for measuring scratch width by sampling diffracted-light intensity. Using this arrangement, several specimen are measured, and the scratches widths can be obtained efficiently and quickly. In general case, the measuring error is smaller than ±15%.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment[J]. Acta Optica Sinica, 1998, 18(1): 90