Semiconductor Optoelectronics, Volume. 43, Issue 2, 218(2022)
Progresses and Challenges of Silicon-based Photonic Chips
Silicon-based photonic chips use photon as the information transmission media, which has the advantages of broad bandwidth, high speed, high integration and compatibility with CMOS technology, and has application value in many fields. In this paper, first, several manufacturing platforms of silicon-based photonic chips are introduced, including silicon-on-insulator (SOI), SiN, Ⅲ-Ⅴ compound materials (such as GaAs and InP) and lithium niobate film on silicon, then the development status and challenges of silicon-based photonic chips are reviewed in the fields of optical communication and interconnection, optical computing, biosensors, light detection and ranging (LiDAR)and quantum photonics, and finally, a summary is presented.
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MA Haoran, LI Xiaomin, WANG Yuehai, YANG Jianyi. Progresses and Challenges of Silicon-based Photonic Chips[J]. Semiconductor Optoelectronics, 2022, 43(2): 218
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Received: Mar. 4, 2022
Accepted: --
Published Online: Jul. 21, 2022
The Author Email: Yuehai WANG (wyuehai@zju.edu.cn)