Fig. 1. Block diagram of Kalman filter flow

Fig. 2. Kalman filter simulation effect

Fig. 3. Laser heterodyne interferometric displacement measurement and angle compensation system

Fig. 4. Compensation devices of laser heterodyne interference displacement measurement

Fig. 5. Experimental results of spot position stability measurement

Fig. 6. Experimental results for comparison of angle measurement

Fig. 7. Angle of measuring mirror measured by laser heterodyne interferometric displacement measuring system

Fig. 8. Comparison before and after displacement compensation