Acta Optica Sinica, Volume. 17, Issue 3, 351(1997)
Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory
[5] [5] Matt Young, Eric G. Johnson, Jr. Richard Goldgraben. Tunable scratch standards. Proc. SPIE, 1985, 525∶ 70~77
[6] [6] L. R. Baker. On-machine measurement of roughness, waviness and flaws. Proc. SPIE, 1992, 1333∶ 248~256
[7] [7] Matt Young. Objective measurement and characterization of scratch standards. Proc. SPIE, 1982, 362∶ 82~92
[8] [8] Horst Truckenbrodt Angela Duparré and Uwe Schuhmann. Roughness and defect characterization of optical surfaces by light scattering measurements. Proc. SPIE, 1992, 1781∶ 139~151
[9] [9] L. R. Baker. Thresholds for surface imperfections. Opt. Eng., 1994, 33(8)∶ 2800~2802
[10] [10] J. C. Stover. Optical Scattering: Measurement and Analysis. New York, McGraw-Hill, 1990∶ 67~75
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[in Chinese], [in Chinese]. Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory[J]. Acta Optica Sinica, 1997, 17(3): 351