Acta Optica Sinica, Volume. 17, Issue 3, 351(1997)

Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory

[in Chinese] and [in Chinese]
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    References(6)

    [5] [5] Matt Young, Eric G. Johnson, Jr. Richard Goldgraben. Tunable scratch standards. Proc. SPIE, 1985, 525∶ 70~77

    [6] [6] L. R. Baker. On-machine measurement of roughness, waviness and flaws. Proc. SPIE, 1992, 1333∶ 248~256

    [7] [7] Matt Young. Objective measurement and characterization of scratch standards. Proc. SPIE, 1982, 362∶ 82~92

    [8] [8] Horst Truckenbrodt Angela Duparré and Uwe Schuhmann. Roughness and defect characterization of optical surfaces by light scattering measurements. Proc. SPIE, 1992, 1781∶ 139~151

    [9] [9] L. R. Baker. Thresholds for surface imperfections. Opt. Eng., 1994, 33(8)∶ 2800~2802

    [10] [10] J. C. Stover. Optical Scattering: Measurement and Analysis. New York, McGraw-Hill, 1990∶ 67~75

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    [in Chinese], [in Chinese]. Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory[J]. Acta Optica Sinica, 1997, 17(3): 351

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 9, 1996

    Accepted: --

    Published Online: Oct. 31, 2006

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