Optics and Precision Engineering, Volume. 21, Issue 9, 2266(2013)

Effect of surface roughness of electrode on detecting capacitance

ZHANG Hai-feng1...2,*, LIU Xiao-wei1,2, LI Hai2 and CHEN Nan2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

    [1] [1] PATRIKAR R M, DONG CH Y, ZHUANG W J. Modelling interconnects with surface roughness [J]. Microelectronics Journal, 2002, 33: 929-934.

    [2] [2] ALBINA A, TABERNA P L, CAMBRONNE J P, et al.. Impact of the surface roughness on the electrical capacitance [J]. Microelectronics Journal, 2006,37: 752-758.

    [3] [3] TSAI N C, LIOU J S, LIN C C, et al.. Design of micro-electromagnetic drive on reciprocally rotating disc used for micro-gyroscopes [J]. Sensors and Actuators A, 2010, 157: 68-76.

    [5] [5] LUO J K, LIN M, FU Y Q, et al.. MEMS based digital variable capacitors with a high-k dielectric insulator [J]. Sensors and Actuators A, 2006, 132: 139-146.

    [6] [6] YU W, ZHANG Q, YE Z, et al.. Efficient statistical capacitance extraction of nanometer interconnects considering the on-chip line edge roughness[J]. Microelectronics Reliability, 2012, 52: 704-710.

    [7] [7] GUO D Z. The effect of electrode surface roughness on the MEMS parallel plate capacitor[C]. CSIT, 2003, 172-180. (in Chinese)

    [8] [8] GILL V, GUDURU P R, SHELDON B W. Electric field induced surface diffusion and micro/nano-scale island growth[J]. International Journal of Solids and Structures, 2008, 45 : 943-958.

    [9] [9] ALBINA A, TABERNA P L, CAMBRONNE J P, et al. Inuence of carbonaceous electrodes on capacitance and breakdown voltage for hybrid capacitor[J]. Microelectronics Journal, 2007, 38 : 642-648.

    [10] [10] PATRIKAR R M. Modeling and simulation of surface roughness [J]. Applied Surface Science, 2004, 228: 213-220.

    [11] [11] ZHAO Y P, WANG G C, LU T M. Surface roughness effect on capacitance and leakage current of an insulating film[J]. Phys. Rev. B, 1999,60: 9157-9164.

    [12] [12] DURAKBASA M N, OSANNA P H, DEMIRCIOGLU P. The factors affecting surface roughness measurement of the machined flat and spherical surface structures-The geometry and the precision of the surface [J]. Measurement, 2011, 44: 1986-1999.

    [13] [13] NI Q L, CHEN B. Measurement of surface roughness by scattering method[J]. Opt. Precision Eng., 2001,4: 151-154. (in Chinese)

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    ZHANG Hai-feng, LIU Xiao-wei, LI Hai, CHEN Nan. Effect of surface roughness of electrode on detecting capacitance[J]. Optics and Precision Engineering, 2013, 21(9): 2266

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    Paper Information

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    Received: Mar. 15, 2013

    Accepted: --

    Published Online: Sep. 25, 2013

    The Author Email: Hai-feng ZHANG (moonzhf@163.com)

    DOI:10.3788/ope.20132109.2266

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