Optics and Precision Engineering, Volume. 19, Issue 8, 1859(2011)
Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating
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BAO Yan, YANG De-xing, LI Bing-shi, WANG Dong-hui, ZHENG Pu-chao. Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating[J]. Optics and Precision Engineering, 2011, 19(8): 1859
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Received: Oct. 12, 2010
Accepted: --
Published Online: Aug. 29, 2011
The Author Email: Yan BAO (by2298@sina.com)
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