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Journal of Inorganic Materials, Volume. 39, Issue 8, 879(2024)

Ti Doped Diamond Like Carbon Films: Piezoresistive Properties and Carrier Transport Behavior

Zhihan ZHAO1...2, Peng GUO2, Jing WEI2, Li CUI2, Shanze LIU1,2, Wenlong ZHANG2, Rende CHEN2, and Aiying WANG23,* |Show fewer author(s)
Author Affiliations
  • 11. School of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315211, China
  • 22. Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
  • 33. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
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    References (27)
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    Figures & Tables(11)
    Cross-sectional SEM images for Ti-DLC films
    1. Cross-sectional SEM images for Ti-DLC films

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    XPS spectra of Ti-DLC films
    2. XPS spectra of Ti-DLC films

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    Raman detection for Ti-DLC films
    3. Raman detection for Ti-DLC films

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    Phase structure, microstructure and EELS analyses for Ti-DLC films
    4. Phase structure, microstructure and EELS analyses for Ti-DLC films

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    I-V plots for Ti-DLC films at different temperatures
    5. I-V plots for Ti-DLC films at different temperatures

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    Electrical properties of Ti-DLC films at different temperatures
    6. Electrical properties of Ti-DLC films at different temperatures

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    R-T fitting results of Ti-DLC films within different temperature ranges
    7. R-T fitting results of Ti-DLC films within different temperature ranges

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    Electrical properties of Ti-DLC films under various relative humidities
    8. Electrical properties of Ti-DLC films under various relative humidities

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    Schematic diagram of the deposition equipment for Ti-DLC film and specific sample positions
    S1. Schematic diagram of the deposition equipment for Ti-DLC film and specific sample positions

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    Piezoresistive testing device
    S2. Piezoresistive testing device

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    Wetting behaviors of Ti-DLC films with different Ti contents
    S3. Wetting behaviors of Ti-DLC films with different Ti contents

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    Zhihan ZHAO, Peng GUO, Jing WEI, Li CUI, Shanze LIU, Wenlong ZHANG, Rende CHEN, Aiying WANG. Ti Doped Diamond Like Carbon Films: Piezoresistive Properties and Carrier Transport Behavior[J]. Journal of Inorganic Materials, 2024, 39(8): 879

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    Paper Information

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    Received: Jan. 3, 2024

    Accepted: --

    Published Online: Dec. 12, 2024

    The Author Email: WANG Aiying (aywang@nimte.ac.cn)

    DOI:10.15541/jim20240005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology