Optics and Precision Engineering, Volume. 28, Issue 10, 2215(2020)

Design and application of miniature multi-parameter water quality sensor chip

WANG Xin1... SUN Li-ning1,2 and SHI Yun-bo1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    Water-quality sensors feature a single measurement function and are greatly affected by ambient temperature. This paper proposes a multi-parameter water-quality sensor chip with temperature compensation. The sensor chip was manufactured using the micro-electro-mechanical system (MEMS) technology. The chip surface contained integrated pH, dissolved oxygen (DO), ammonia-nitrogen, and temperature sensors. To achieve temperature compensation, the chip was also designed with a sandwich-plate snake Pt resistance heater. At the same time, a microfluidic test chamber that was matched with the chip was designed to realize water-sample measurement. Finite-element steady-state thermal analysis was used to analyze the heat-transfer process of four heaters, and a reasonable chip-structure layout was established. Thereafter, the sensor chip was fabricated using the MEMS technology. The performance of the sensor chip was investigated using a laboratory-developed potentiostat test circuit. Experimental results show that the pH sensor has a high sensitivity of 0.288 mA/pH.The sensitivity of the temperature sensor is 0.949 Ω/℃ and that of the ammonia-nitrogen sensor was 0.113 9 mA/(mg·L-1). The sensitivity of the DO sensor is 2.22 μA/(mg·L-1) and that of the temperature sensor, which changes with respect to the heater power, is 0.312 6 ℃/mW. Compared with a single water-quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and exhibited a good temperature-compensation effect. Moreover, the sensor chip was small in size, robust, and highly accurate.

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    WANG Xin, SUN Li-ning, SHI Yun-bo. Design and application of miniature multi-parameter water quality sensor chip[J]. Optics and Precision Engineering, 2020, 28(10): 2215

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    Paper Information

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    Received: Apr. 30, 2020

    Accepted: --

    Published Online: Nov. 25, 2020

    The Author Email:

    DOI:10.37188/ope.20202810.2215

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