Solar-blind UV induced Transmission Filters (SBU-ITFs) were fabricated by ion-beam sputtering. Firstly, SBU-ITFs were designed and analyzed theoretically, and the deposition of ZrO2, SiO2 and Al films by ion beam sputtering was optimized. The optical constants of ZrO2 and SiO2 films were derived from the transmitting and reflecting spectra, and the optical constant of Al film was determined by the inversion of the variable incidence ellipsometric spectrum of a sample JGS1/SiO2/Al/SiO2/air(SAS).On the basis of the research, the SBU-ITFs were fabricated by using the three films above and their optical properties were measured. The measurement for SBU-ITFs shows that the peak transmittance of the filter at the 264 nm center wavelength is larger than 60%, the transmittance band width (FWHM) is about 13 nm, and the optical density in the 300-350 nm cutoff spectral region reaches to 2.6.The analysis of the transmittance shows that the main factors affecting the properties of SBU-ITFs are a slower deposition speed for Al film and smaller amount of O2 contents remaining in the chamber during the deposition of Al film.