The all-solid-state inductive energy storage pulse forming line modulator is a brand-new solution to achieve a high repetition rate, high voltage gain, and short pulse output. However, due to the non-ideal dynamic characteristics of the switch and the fixed physical space size of the transmission line, it's difficult to realize the generation and control of high-voltage short pulses. To solve the above problems, we established the switch drive model of the silicon carbide field-effect device through electromagnetic field analysis. It was found that high-speed drive and low parasitic parameters of the switch device can effectively improve the dynamic characteristics of the switch, and the onboard high-speed switch and drive integrated design solution were proposed. At the same time, based on wave process analysis and multi-switch sequential logic control theory, a multi-switch clipping circuit topology method and active load impedance modulation technology are proposed. Finally, an experimental platform was built to verify the above ideas. Experimental results show that the modulator can achieve a square wave short pulse with a rise time of 2.1 ns, a fall time of 3.5 ns, and a pulse width of 5.1 ns and the pulse width is continuously adjustable from 5 to 20 ns. After 10 levels of superposition, the regulator’s high voltage capability is verified. When the primary energy storage charging voltage is 25 V, the voltage gain can reach 336 times, and the repetition frequency is 200 kHz.