Theory and Experiments about Optical Stylus Method

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 19, Issue 11, 1523(1999)

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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A new roughness measurement technique, optical stylus method is presented. The principle of the new method is based on the phenomenon of light modulated by surface profile. The modulation principle, the theory of light coupled area, a optical profilometer with a single mode fiber probe and experiment results are detailed.

Keywords

fiber probe optical stylographic method roughness measurement surface profile modulation

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Theory and Experiments about Optical Stylus Method[J]. Acta Optica Sinica, 1999, 19(11): 1523

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