Acta Photonica Sinica, Volume. 42, Issue 12, 1473(2013)
Analysis and Optimum Design of Silicononinsulator Microring Resonator Electrooptic Modulator
Aiming at application requirements of highfrequency electrooptic modulators, a PIN type electrooptic modulator based on SOI resonator has been proposed. Describing the resonance characteristic of microring resonator via the Scattering Matrix Method, combining the variation of effective refractive index of silicon resulted from carrier concentration changing, the plasma dispersion effect, analyzing the theoretical model of the microring resonator electrooptic modulator systematically. Based on the simulation and analysis of the crosssection optical field distribution of rib waveguide by Rsoft simulation software, a design of rib waveguide microring resonator with better performance of optical field confinement has been obtained. Furthermore, the performance of the PIN type diode for different doping concentrations has been simulated by Sentaurus TCAD simulation software. Finally, a blue shift of 58.74GHz is achieved from the theoretical model. It is demonstrated that the optimum design of the electrooptic modulator is reasonable and meaningful in further study of electrooptic modulator.
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WEI Liping, WANG Yonghua, ZANG Junbin, CUI Danfeng, LI Yanna, LIU Yaoying, XUE Chenyang. Analysis and Optimum Design of Silicononinsulator Microring Resonator Electrooptic Modulator[J]. Acta Photonica Sinica, 2013, 42(12): 1473
Received: Jul. 11, 2013
Accepted: --
Published Online: Dec. 16, 2013
The Author Email: Liping WEI (weiliuliu666@163.com)