Acta Optica Sinica, Volume. 15, Issue 8, 1148(1995)
Fabrication of Soft X-Ray Condenser Zone Plates
Soft x-ray condenser zone plates with three kinds of parameters are fabricated by holograph-ion beam etching technique. Zone plate condensers are used in our soft xray microscopy experiments which act in combination with a pinhole as a linear monochromator.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Soft X-Ray Condenser Zone Plates[J]. Acta Optica Sinica, 1995, 15(8): 1148