Preparation of black silicon by nanosecond pulsed laser and its optical properties

WANG Ke; WANG Zilin; ZHOU Xiaoyu; HUANG Weiqi; ZHANG Tiemin; PENG Hongyan; WANG Anchen; ZHANG Xi; HUANG Zhongmei; LIU Shirong

doi:10.3969/j.issn.1007-5461.2024.05.011

Chinese Journal of Quantum Electronics, Volume. 41, Issue 5, 813(2024)

Preparation of black silicon by nanosecond pulsed laser and its optical properties

WANG Ke^1,5, WANG Zilin¹, ZHOU Xiaoyu¹, HUANG Weiqi^1,2、*, ZHANG Tiemin¹, PENG Hongyan¹, WANG Anchen², ZHANG Xi², HUANG Zhongmei^2,3, and LIU Shirong⁴

Author Affiliations

¹School of Physics & Electronic Engineering, Hainan Normal University, Haikou 571158, China

²School of Materials and Metallurgy, Guizhou University, Guiyang 550025, China

³State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China

⁴State Key Laboratory of Environmental Geochemistry, Institute of Geochemistry, Chinese Academy of Sciences, Guiyang 550081, China

⁵China National Building Material Photonics Technology Co., Ltd., Zaozhuang 277102, China

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Ke WANG, Zilin WANG, Xiaoyu ZHOU, Weiqi HUANG, Tiemin ZHANG, Hongyan PENG, Anchen WANG, Xi ZHANG, Zhongmei HUANG, Shirong LIU. Preparation of black silicon by nanosecond pulsed laser and its optical properties[J]. Chinese Journal of Quantum Electronics, 2024, 41(5): 813

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Paper Information

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Received: Nov. 10, 2022

Accepted: --

Published Online: Jan. 8, 2025

The Author Email: Weiqi HUANG (wqhuang@hainnu.edu.cn)

DOI:10.3969/j.issn.1007-5461.2024.05.011

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology