Laser & Optoelectronics Progress, Volume. 60, Issue 17, 1714005(2023)

Study on Process and Quality of Dual Laser Etching and Cleaning Flexible Copper Clad Laminate

Zhihui Huang1, Qike Ye2, Qijiao Ye2, and Jianhong Liao1、*
Author Affiliations
  • 1School of Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510006, Guangdong , China
  • 2Lijieke Laser Technology Co., Ltd., Guangzhou 511450, Guangdong , China
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    We propose a dual laser simultaneous etching and cleaning technique to solve the issues of residual glue (blockage), over-etching, sidewall damage, and tedious subsequent processing of blind holes in copper clad laminates by nanosecond laser etching. First-order blind hole etching experiments were conducted on copper clad laminates using nanosecond and nanosecond-matched picosecond lasers. Furthermore, a blind hole with a 122.24 μm diameter, a (37.02 ± 0.04) μm depth (37.00 μm processing requirement), a 0.16 μm bottom roughness, and a 0.25 μm surface roughness on the side walls was etched without shrinkage on a 49.00 μm-thick copper clad plate using the nanosecond-matched picosecond laser. The results indicate a significant improvement in the processing accuracy and quality of the dual laser etching and cleaning process for the copper clad plates, thereby obtaining high-quality blind holes. In conclusion, the nanosecond-matched picosecond laser shows superior etching depth (accuracy), cleanliness, taper, and roughness compared to the nanosecond laser.

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    Zhihui Huang, Qike Ye, Qijiao Ye, Jianhong Liao. Study on Process and Quality of Dual Laser Etching and Cleaning Flexible Copper Clad Laminate[J]. Laser & Optoelectronics Progress, 2023, 60(17): 1714005

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Aug. 1, 2022

    Accepted: Sep. 5, 2022

    Published Online: Sep. 13, 2023

    The Author Email: Liao Jianhong (liaojh@scnu.edu)

    DOI:10.3788/LOP222190

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