Journal of Synthetic Crystals, Volume. 49, Issue 4, 600(2020)

Three-Dimensional Numerical Simulation on the Effect of Superconducting Horizon Magnetic Field Structures on Solid-Liquid Interface of 300 mm Czochralski Monocrystalline Silicon

ZHANG Jing... DU Yanjun, LIU Ding* and REN Junchao |Show fewer author(s)
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    Aiming at the influence of the magnetic field line distribution of different superconducting transverse magnetic field structures on the solid-liquid interface of 300 mm Czochralski monocrystalline silicon, a coupling thermal lattice model based on the lattice Boltzmann method was adopted to solve the problem of coupling modeling of temperature and velocity fields. And three-dimensional numerical simulation of crystal growth under the superconducting magnetic field of the different structures was conducted. The result indicate that the oxygen content at solid-liquid interface is successfully lowered through the adoption of superconducting magnetic field with single magnetic line distribution; however, the heat distribution inside the melt is likely to be uneven. Adopting double magnetic line distribution may effectively perfect the axial temperature gradient that grows along the crystal and the radial temperature gradient that grows along the solid-liquid interface inside the melt. However, it has less restraining effect on the oxygen content at solid-liquid interface. When the crystal rotation and the crucible rotating were applied, the superconducting single magnetic line magnetic field structure is much better than superconducting double magnetic line magnetic field structure; besides, as the magnetic induction increases, the shape symmetry of the solid-liquid interface increases.

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    ZHANG Jing, DU Yanjun, LIU Ding, REN Junchao. Three-Dimensional Numerical Simulation on the Effect of Superconducting Horizon Magnetic Field Structures on Solid-Liquid Interface of 300 mm Czochralski Monocrystalline Silicon[J]. Journal of Synthetic Crystals, 2020, 49(4): 600

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Jun. 15, 2020

    The Author Email: Ding LIU (liud@xaut.edu.cn)

    DOI:

    CSTR:32186.14.

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