Acta Optica Sinica, Volume. 20, Issue 11, 1533(2000)
Study on Testing Method for Microprofile of Optical Supersmooth Surface
Some advantages and important application of the testing method for optical supersmooth surface using atomic force microscope (AFM) are discussed. Some testing results of microprofile and micro-defect with nonometer-grade for optical supersmooth surface using AFM method are presented, and the change of morphology and micro-roughness before and after coating of same surface is given. For comparison, testing results of micro-roughness parameters for same surface measured using interference profiler are presented too. It is indicated that AFM method has three-dimensional high-accuracy, but interference method has only one-dimensional, so the former can give true morphology and microprofile of surface.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Testing Method for Microprofile of Optical Supersmooth Surface[J]. Acta Optica Sinica, 2000, 20(11): 1533