Acta Optica Sinica, Volume. 20, Issue 8, 1148(2000)
Design of 0.35 μm Step-and-Repeat Projection Lithography Objective
The main points of design of 0.35 μm step-and-repeat projection lithography objective are introduced such as the determination of number aperture and structure model and the selection of material. The difficulties, novel design and a design result of lithography objective are discussed.
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[in Chinese], [in Chinese]. Design of 0.35 μm Step-and-Repeat Projection Lithography Objective[J]. Acta Optica Sinica, 2000, 20(8): 1148
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