Laser & Optoelectronics Progress, Volume. 60, Issue 5, 0522001(2023)

Design and Fabrication of the Antireflection Subwavelength Structure of Convex Germanium Optical Window

Fokui Chen1,2, Jiang Ding1, Ming Yu2, Cui Ma2, and Hui Lin2、*
Author Affiliations
  • 1School of Mechanical Engineering, Guangxi University, Nanning 530004, Guangxi, China
  • 2Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, Guangdong, China
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    The sensitivity of infrared optical imaging systems is closely related to the transmittance of optical windows, and Ge windows are commonly used windows in infrared optical systems. Fabrication of subwavelength structures on Ge windows can enhance the antireflection performance so as to improve the optical transmittance, and the Ge windows are usually convex shaped to get a larger field angle. However, based on current methods, it is difficult and complicated to fabricate subwavelength structures on curved windows. To solve this problem, this study presented an efficient and high-quality way to fabricate subwavelength antireflection structures on the convex Ge window based on soft ultraviolet nanoimprint lithography (soft UV-NIL). The parameters of the subwavelength antireflection structures were optimized based on the finite-difference time-domain method first. The subwavelength structures were fabricated on the convex Ge window by soft UV-NIL. Test result shows that the average single-side transmittance of the convex Ge window is raised from 65.81% to 78.68% in the region of 3.55-5.55 μm, and specifically, from 65.85% to 83.13% at the wavelength of 4.4 μm. As a result, the broadband antireflection performance in mid-infrared is realized.

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    Fokui Chen, Jiang Ding, Ming Yu, Cui Ma, Hui Lin. Design and Fabrication of the Antireflection Subwavelength Structure of Convex Germanium Optical Window[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0522001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Dec. 3, 2021

    Accepted: Jan. 13, 2022

    Published Online: Mar. 6, 2023

    The Author Email: Lin Hui (hui.lin@siat.ac.cn)

    DOI:10.3788/LOP213148

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