INFRARED, Volume. 42, Issue 2, 1(2021)

Research on Fabrication of SW/MW Dual-band MCT Infrared Detectors

Jing-wei WANG, Zhong-he LI, Da GAO, Yan-lei XING, and Cheng-gang WANG
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  • [in Chinese]
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    The latest research progress of SW/MW dual-band mercury cadmium telluride(MCT)materials and devices based on molecular beam epitaxy(MBE)is reported. High-quality SW/MW dual-band MCT materials are grown by the MBE method, and the surface defect density is controlled below 300 cm-2 by improving the material quality. On this basis, the chip fabrication process is further optimized, especially in terms of reducing the pixel pitch. A 320×256 SW/MW dual-band MCT infrared detector assembly is fabricated based on the above-mentioned various material and device processes. The results show that the test performance and imaging effect of the assembly are good.

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    WANG Jing-wei, LI Zhong-he, GAO Da, XING Yan-lei, WANG Cheng-gang. Research on Fabrication of SW/MW Dual-band MCT Infrared Detectors[J]. INFRARED, 2021, 42(2): 1

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    Paper Information

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    Received: Sep. 16, 2020

    Accepted: --

    Published Online: Aug. 16, 2021

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2021.02.001

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