INFRARED, Volume. 42, Issue 2, 1(2021)
Research on Fabrication of SW/MW Dual-band MCT Infrared Detectors
The latest research progress of SW/MW dual-band mercury cadmium telluride(MCT)materials and devices based on molecular beam epitaxy(MBE)is reported. High-quality SW/MW dual-band MCT materials are grown by the MBE method, and the surface defect density is controlled below 300 cm-2 by improving the material quality. On this basis, the chip fabrication process is further optimized, especially in terms of reducing the pixel pitch. A 320×256 SW/MW dual-band MCT infrared detector assembly is fabricated based on the above-mentioned various material and device processes. The results show that the test performance and imaging effect of the assembly are good.
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WANG Jing-wei, LI Zhong-he, GAO Da, XING Yan-lei, WANG Cheng-gang. Research on Fabrication of SW/MW Dual-band MCT Infrared Detectors[J]. INFRARED, 2021, 42(2): 1
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Received: Sep. 16, 2020
Accepted: --
Published Online: Aug. 16, 2021
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