Acta Optica Sinica, Volume. 19, Issue 3, 398(1999)
Study of Soft X-Ray Multilayer Beamsplitters
The design and testing of the soft X-ray multilayer beam-splitters are presented. The beam-splitters of Mo/Si multilayer with a large area by etching substrate and separating multilayer from substrate with NaCl coating are fabricated.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Soft X-Ray Multilayer Beamsplitters[J]. Acta Optica Sinica, 1999, 19(3): 398
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