Acta Optica Sinica, Volume. 9, Issue 12, 1092(1989)

Precise measurement of micro-vibration amplitude

TANG JUNXIONG, WAN LIAN, WU YIFANG, SHI QING, and ZHENG LEMIN
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    A precise measuring method of micro-vibration amplitude is reported. Optical heterodyne phase detecting technique, servo looking for the optical path difference of interferometer and narrow band detecting technique are used. The signal to noise ratio is improved greatly. The sensitivity of amplitude measuring can reach 2.2×10-2 A/ (2 kHz signal).

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    TANG JUNXIONG, WAN LIAN, WU YIFANG, SHI QING, ZHENG LEMIN. Precise measurement of micro-vibration amplitude[J]. Acta Optica Sinica, 1989, 9(12): 1092

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    Paper Information

    Received: Sep. 9, 1998

    Accepted: --

    Published Online: Sep. 20, 2011

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